Photolithography

• SVG Coat 1
  • Current Process Monitoring Results

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• SVG Coat 2
  • Current Process Monitoring Results

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• SVG Coat 1 & 2
  • Statistical Process Control graph (Average Thickness and Uniformity data for G-line resist) 
  • Statistical Process Control graph (Average Thickness and Uniformity data for I-line resist)

• SVG Coat 6

• Current Process Monitoring Results

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• Statistical Process Control graph (DUV Resist Thickness, Non-Uniformity)
• Statistical Process Control graph (ASML Clear Engergy (E0))