Process monitoring data

<body> <A NAME="top"></A> <img src="images/tylan.gif" ALT=""><br> <h1> Process Monitoring Information </h1> <UL> <LI><A HREF="#tylans">Tystar Process Monitoring</A> <LI><A HREF="#lams">Lam Process Monitoring</A> <LI><A HREF="#cpa_stuff">CPA Process Monitoring</A> <LI><A HREF="#photoresist">Photoresist Thickness Monitoring</A> </UL> <H2> <A NAME="tylans">Tystar Process Monitoring</A> </H2> <UL> <LI>Tystar9 MOS Clean Silicon Nitride (Si3N4) LPCVD Furnaces (4" and 6") <UL> <LI><A HREF="./tylan9.txt">Current Process Monitoring Results</A> <LI><A HREF="./images/tylan9.gif">Statistical Process Control graph for Deposition Rates</A> </UL> <LI>Tylan 11, LPCVD Poly <UL> <LI><A HREF="./tylan11.txt">Current Process Monitoring Results</A> <LI><A HREF="./images/tylan11-dep.gif">Statistical Process Control graph for Deposition Rates</A> <LI><A HREF="./images/tylan11-resist.gif">Statistical Process Control graph for Resistivity</A> </UL> <LI>Tylan 12, LPCVD Oxide <UL> <LI><A HREF="./tylan12.txt">Current Process Monitoring Results</A> <LI><A HREF="./images/tylan12-dep.gif">Statistical Process Control graph for Deposition Rates</A> <LI><A HREF="./images/tylan12-dopant.gif">Statistical Process Control graph for Dopant Concentration</A> </UL> <LI>Tylan 16, LPCVD Poly <UL> <LI><A HREF="./tylan16.txt">Current Process Monitoring Results</A>. <LI><A HREF="./images/tylan16.gif">Statistical Process Control graph for Deposition Rates</A> </UL> <LI>Tylan 18, LPCVD Low-Stress Nitride <UL> <LI><A HREF="./tylan18.txt">Current Process Monitoring Results</A> <LI><A HREF="./images/tylan18-dep.gif">Statistical Process Control graph for Deposition Rates</A> <LI><A HREF="./images/tylan18-stress.gif">Statistical Process Control graph for Film Stress</A> </UL> <LI>Tylan 20, LPCVD Oxide <UL> <LI><A HREF="http:tylan20.txt">Current Process Monitoring Results</A> <LI><A HREF="http:images/tylan20-dep.gif">Statistical Process Control graph for Deposition Rates</A> <LI><A HREF="http:images/tylan20-dopant.gif">Statistical Process Control graph for Dopant Concentration</A> </UL> <LI>Get old process monitoring results <A HREF="http:Oldtylan">here</A>. <LI> Go back to the <A HREF="process.html#top">top.</A> </UL> <H2> <A NAME="projects">Tylan Projects</A> </H2> <UL> <LI>The <A HREF="http:tylan9-char.txt">Tylan 9 characterization project</A> was done to see what effects changes in the temperature, pressure, and gas flows would have on the deposition rate and uniformities. <LI> The <A HREF="http:tylan16.open_closed_boat.txt">Tylan 16 open/closed boat comparison</A> was performed to see what the consequence of using an open boat would be. <LI> Go back to the <A HREF="process.html#top">top.</A> </UL> <HR> <H2> <A NAME="lams">Lam Process Monitoring</A> </H2> <UL> <LI>Current data for <A HREF="http:lam1.txt">Lam 1</A>, Nitride Plasma Etching. <LI>Current data for <A HREF="http:lam2.txt">Lam 2</A>, Oxide Plasma Etching. <LI>Current data for <A HREF="http:lam3.txt">Lam 3</A>, Aluminum Plasma Etching. <LI>Current data for <A HREF="http:lam4.txt">Lam 4</A>, Poly-Silicon Plasma Etching. <LI>Get old Lam results <A HREF="http:Oldlam">here</A>. <LI> Go back to the <A HREF="process.html#top">top.</A> </UL><HR> <H2> <A NAME="cpa_stuff">CPA Process Monitoring</A> </H2> <UL> <LI>Current data for the <A HREF="http:cpa.txt">CPA</A> <LI>Get old CPA results <A HREF="http:OldCPA">here</A> <LI> Go back to the <A HREF="process.html#top">top.</A> </UL><HR> <H2> <A NAME="photoresist">Photoresist Thickness Monitoring</A> </H2> <UL> <LI> Process Monitoring Graphs for OCG G-Line Resist <UL> <LI> Average Resist <A HREF="http:images/g-line_thickness.gif">Thickness</A> <LI> Resist Thickness <A HREF="http:images/g-line_range.gif">Range</A> <LI> Resist Thickness <A HREF="http:images/g-line_uniformity.gif">Uniformity</A> </UL> <LI> Process Monitoring Graphs for OCG I-Line Resist <UL> <LI> Average Resist <A HREF="http:images/i-line_thickness.gif">Thickness</A> <LI> Resist Thickness <A HREF="http:images/i-line_range.gif">Range</A> <LI> Resist Thickness <A HREF="http:images/i-line_uniformity.gif">Uniformity</A> <LI> Go back to the <A HREF="process.html#top">top.</A> </UL> </UL><BR> <IMG SRC="/graphics/BlueMarbleLine.gif" ALT="**********************************************************************"><BR> <a href="#top"> <img align=middle src="images/def-icons/up-arrow.gif" ALT=""> Back to the top</a> <HR> <a href="/"><iMG align=middle SRC="/graphics/logo.xbm" ALT=""> Back to the Microlab Home Page.</a><hr> <UL><date>January 23, 1996</date></UL> <A NAME="top"></A> <img src="images/tylan.gif" ALT=""><br> <h1> Process Monitoring Information </h1> <IMG SRC="/graphics/BlueMarbleLine.gif" ALT="**********************************************************************"><BR> <UL> <LI><A HREF="#tylans">Tystar Process Monitoring</A> <LI><A HREF="#lams">Lam Process Monitoring</A> <LI><A HREF="#cpa_stuff">CPA Process Monitoring</A> <LI><A HREF="#photoresist">Photoresist Thickness Monitoring</A> </UL> <IMG SRC="/graphics/BlueMarbleLine.gif" ALT="**********************************************************************"><BR> <H2> <A NAME="tylans">Tystar Process Monitoring</A> </H2> <UL> <LI>Tystar9 MOS Clean Silicon Nitride (Si3N4) LPCVD Furnaces (4" and 6") <UL> <LI><A HREF="./tylan9.txt">Current Process Monitoring Results</A> <LI><A HREF="./images/tylan9.gif">Statistical Process Control graph for Deposition Rates</A> </UL> <LI>Tylan 11, LPCVD Poly <UL> <LI><A HREF="./tylan11.txt">Current Process Monitoring Results</A> <LI><A HREF="./images/tylan11-dep.gif">Statistical Process Control graph for Deposition Rates</A> <LI><A HREF="./images/tylan11-resist.gif">Statistical Process Control graph for Resistivity</A> </UL> <LI>Tylan 12, LPCVD Oxide <UL> <LI><A HREF="./tylan12.txt">Current Process Monitoring Results</A> <LI><A HREF="./images/tylan12-dep.gif">Statistical Process Control graph for Deposition Rates</A> <LI><A HREF="./images/tylan12-dopant.gif">Statistical Process Control graph for Dopant Concentration</A> </UL> <LI>Tylan 16, LPCVD Poly <UL> <LI><A HREF="./tylan16.txt">Current Process Monitoring Results</A>. <LI><A HREF="./images/tylan16.gif">Statistical Process Control graph for Deposition Rates</A> </UL> <LI>Tylan 18, LPCVD Low-Stress Nitride <UL> <LI><A HREF="./tylan18.txt">Current Process Monitoring Results</A> <LI><A HREF="./images/tylan18-dep.gif">Statistical Process Control graph for Deposition Rates</A> <LI><A HREF="./images/tylan18-stress.gif">Statistical Process Control graph for Film Stress</A> </UL> <LI>Tylan 20, LPCVD Oxide <UL> <LI><A HREF="http:tylan20.txt">Current Process Monitoring Results</A> <LI><A HREF="http:images/tylan20-dep.gif">Statistical Process Control graph for Deposition Rates</A> <LI><A HREF="http:images/tylan20-dopant.gif">Statistical Process Control graph for Dopant Concentration</A> </UL> <LI>Get old process monitoring results <A HREF="http:Oldtylan">here</A>. <LI> Go back to the <A HREF="process.html#top">top.</A> </UL> <H2> <A NAME="projects">Tylan Projects</A> </H2> <UL> <LI>The <A HREF="http:tylan9-char.txt">Tylan 9 characterization project</A> was done to see what effects changes in the temperature, pressure, and gas flows would have on the deposition rate and uniformities. <LI> The <A HREF="http:tylan16.open_closed_boat.txt">Tylan 16 open/closed boat comparison</A> was performed to see what the consequence of using an open boat would be. <LI> Go back to the <A HREF="process.html#top">top.</A> </UL> <HR> <H2> <A NAME="lams">Lam Process Monitoring</A> </H2> <UL> <LI>Current data for <A HREF="http:lam1.txt">Lam 1</A>, Nitride Plasma Etching. <LI>Current data for <A HREF="http:lam2.txt">Lam 2</A>, Oxide Plasma Etching. <LI>Current data for <A HREF="http:lam3.txt">Lam 3</A>, Aluminum Plasma Etching. <LI>Current data for <A HREF="http:lam4.txt">Lam 4</A>, Poly-Silicon Plasma Etching. <LI>Get old Lam results <A HREF="http:Oldlam">here</A>. <LI> Go back to the <A HREF="process.html#top">top.</A> </UL><HR> <H2> <A NAME="cpa_stuff">CPA Process Monitoring</A> </H2> <UL> <LI>Current data for the <A HREF="http:cpa.txt">CPA</A> <LI>Get old CPA results <A HREF="http:OldCPA">here</A> <LI> Go back to the <A HREF="process.html#top">top.</A> </UL><HR> <H2> <A NAME="photoresist">Photoresist Thickness Monitoring</A> </H2> <UL> <LI> Process Monitoring Graphs for OCG G-Line Resist <UL> <LI> Average Resist <A HREF="http:images/g-line_thickness.gif">Thickness</A> <LI> Resist Thickness <A HREF="http:images/g-line_range.gif">Range</A> <LI> Resist Thickness <A HREF="http:images/g-line_uniformity.gif">Uniformity</A> </UL> <LI> Process Monitoring Graphs for OCG I-Line Resist <UL> <LI> Average Resist <A HREF="http:images/i-line_thickness.gif">Thickness</A> <LI> Resist Thickness <A HREF="http:images/i-line_range.gif">Range</A> <LI> Resist Thickness <A HREF="http:images/i-line_uniformity.gif">Uniformity</A> <LI> Go back to the <A HREF="process.html#top">top.</A> </UL> </UL><BR> <IMG SRC="/graphics/BlueMarbleLine.gif" ALT="**********************************************************************"><BR> <a href="#top"> <img align=middle src="images/def-icons/up-arrow.gif" ALT=""> Back to the top</a> <HR> <a href="/"><iMG align=middle SRC="/graphics/logo.xbm" ALT=""> Back to the Microlab Home Page.</a><hr> <UL><date>January 23, 1996</date></UL> </body>