ETCHERS

Process Monitoring Information

Current data for Lam6, 6" Silicon Oxide Etch
- Current Process Monitoring Results
- Statistical Process Control graph for Etch Rates
Current data for Lam7, 6" Aluminum Etch
- Current Process Monitoring Results
- Statistical Process Control graph for Etch Rates
Current data for Lam8, 6" Poly Silicon Etch
- Current Process Monitoring Results
- Statistical Process Control graph for Etch Rates
Current data for STS1, 6" Deep Silicon Etch
- Current Process Monitoring Results
- Statistical Process Control graph for Etch Rates, Selectivity, and Uniformity
Current data for STS2, 6" Deep Silicon Etch
- Current Process Monitoring Results
- Statistical Process Control graph for Etch Rates, Selectivity, and Uniformity
Current data for STS-oxide, 6" Deep Silicon Etch
- Current Process Monitoring Results
- Statistical Process Control graph for Etch Rates, Selectivity, and Uniformity