ETCHERS
Process Monitoring Information
- Current data for Lam1, 4" Silicon Nitride Etch.
- Current data for Lam2, 4" Silicon Oxide Etch.
- Current data for Lam3, 4" Aluminum Etch.
- Current data for Lam4, 4" Poly Silicon Etch.
- Current data for Lam5, 6" Poly Silicon Etch.
- Current data for STS 4" Deep Silicon Etch.
- Current data for Centura 6" Deep Silicon Etch.